| setElogSubSheetRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setElogSheetRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setUnitId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setSlot(Integer) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setChamberType(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setChamberFlow(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setRecipeId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setProcessStartTime(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setProcessEndTime(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| ELogSubSheetDto() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getElogSubSheetRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getElogSheetRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getUnitId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getSlot() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getChamberType() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getChamberFlow() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getRecipeId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getProcessStartTime() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getProcessEndTime() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |