| Entity |  | 0% |  | 0% | 166 | 166 | 262 | 262 | 165 | 165 | 1 | 1 |
| PmsSchedule |  | 0% |  | 0% | 125 | 125 | 189 | 189 | 124 | 124 | 1 | 1 |
| ChecklistJob |  | 0% | | n/a | 102 | 102 | 152 | 152 | 102 | 102 | 1 | 1 |
| SeasonEntity |  | 0% |  | 0% | 68 | 68 | 104 | 104 | 49 | 49 | 1 | 1 |
| ELogSheetHistory |  | 0% |  | 0% | 96 | 96 | 143 | 143 | 95 | 95 | 1 | 1 |
| EquipmentConstrainPairDetail |  | 0% | | n/a | 54 | 54 | 108 | 108 | 54 | 54 | 1 | 1 |
| Equipment |  | 0% |  | 0% | 73 | 73 | 113 | 113 | 70 | 70 | 1 | 1 |
| ChecklistJobData |  | 0% |  | 0% | 69 | 69 | 114 | 114 | 68 | 68 | 1 | 1 |
| Resist |  | 0% |  | 0% | 32 | 32 | 67 | 67 | 29 | 29 | 1 | 1 |
| Season |  | 0% | | n/a | 66 | 66 | 99 | 99 | 66 | 66 | 1 | 1 |
| PmSchedule |  | 0% | | n/a | 67 | 67 | 100 | 100 | 67 | 67 | 1 | 1 |
| EquipmentConstrainPair |  | 0% | | n/a | 38 | 38 | 76 | 76 | 38 | 38 | 1 | 1 |
| PmsSchedule4Count |  | 0% |  | 0% | 5 | 5 | 40 | 40 | 3 | 3 | 1 | 1 |
| PmControlTypeEnum |  | 0% |  | 0% | 17 | 17 | 26 | 26 | 4 | 4 | 1 | 1 |
| EquipmentTriggerMaintainQuery |  | 0% | | n/a | 49 | 49 | 74 | 74 | 49 | 49 | 1 | 1 |
| SpcResultEquipment |  | 0% |  | 0% | 41 | 41 | 66 | 66 | 40 | 40 | 1 | 1 |
| EquipmentConfig |  | 0% | | n/a | 43 | 43 | 64 | 64 | 43 | 43 | 1 | 1 |
| EntityCounter |  | 0% | | n/a | 43 | 43 | 64 | 64 | 43 | 43 | 1 | 1 |
| PCD |  | 0% | | n/a | 37 | 37 | 58 | 58 | 37 | 37 | 1 | 1 |
| ELogSubSheetEvent |  | 0% | | n/a | 37 | 37 | 55 | 55 | 37 | 37 | 1 | 1 |
| EntityReservation |  | 0% |  | 0% | 33 | 33 | 46 | 46 | 27 | 27 | 1 | 1 |
| ResistEqptMapping |  | 0% | | n/a | 29 | 29 | 52 | 52 | 29 | 29 | 1 | 1 |
| ELogSubSheetHistory |  | 0% | | n/a | 33 | 33 | 49 | 49 | 33 | 33 | 1 | 1 |
| LotChangeLocationHistory |  | 0% | | n/a | 33 | 33 | 49 | 49 | 33 | 33 | 1 | 1 |
| EquipmentTriggerMaintain |  | 0% | | n/a | 31 | 31 | 46 | 46 | 31 | 31 | 1 | 1 |
| ResistRcpMapping |  | 0% | | n/a | 30 | 30 | 48 | 48 | 30 | 30 | 1 | 1 |
| PmsSchedule4Time |  | 0% |  | 0% | 9 | 9 | 17 | 17 | 3 | 3 | 1 | 1 |
| ResistStatus |  | 0% | | n/a | 31 | 31 | 46 | 46 | 31 | 31 | 1 | 1 |
| ChecklistItem |  | 0% | | n/a | 31 | 31 | 46 | 46 | 31 | 31 | 1 | 1 |
| ResistEnum |  | 0% | | n/a | 3 | 3 | 7 | 7 | 3 | 3 | 1 | 1 |
| PcdClean |  | 0% |  | 0% | 28 | 28 | 42 | 42 | 27 | 27 | 1 | 1 |
| Reticle |  | 0% | | n/a | 27 | 27 | 42 | 42 | 27 | 27 | 1 | 1 |
| Event |  | 0% |  | 0% | 23 | 23 | 37 | 37 | 22 | 22 | 1 | 1 |
| ResistMapping |  | 0% | | n/a | 27 | 27 | 40 | 40 | 27 | 27 | 1 | 1 |
| EquipmentTriggerMaintainHistory |  | 0% | | n/a | 25 | 25 | 37 | 37 | 25 | 25 | 1 | 1 |
| EmployeeCertification |  | 0% | | n/a | 24 | 24 | 39 | 39 | 24 | 24 | 1 | 1 |
| Checklist |  | 0% |  | 0% | 19 | 19 | 31 | 31 | 18 | 18 | 1 | 1 |
| PcdAssembly |  | 0% | | n/a | 23 | 23 | 34 | 34 | 23 | 23 | 1 | 1 |
| EntityCounterType |  | 0% | | n/a | 23 | 23 | 34 | 34 | 23 | 23 | 1 | 1 |
| LotConstrainTrigger |  | 0% | | n/a | 23 | 23 | 34 | 34 | 23 | 23 | 1 | 1 |
| PmsSchedule4Trigger |  | 0% |  | 0% | 5 | 5 | 17 | 17 | 3 | 3 | 1 | 1 |
| ELogSheetEvent |  | 0% | | n/a | 21 | 21 | 31 | 31 | 21 | 21 | 1 | 1 |
| ProductLayerMask |  | 0% | | n/a | 20 | 20 | 31 | 31 | 20 | 20 | 1 | 1 |
| EntityConstraint |  | 0% | | n/a | 19 | 19 | 29 | 29 | 19 | 19 | 1 | 1 |
| EventModel |  | 0% | | n/a | 17 | 17 | 27 | 27 | 17 | 17 | 1 | 1 |
| EquipmentConstrainPairHistory |  | 0% | | n/a | 19 | 19 | 28 | 28 | 19 | 19 | 1 | 1 |
| Location |  | 0% | | n/a | 18 | 18 | 28 | 28 | 18 | 18 | 1 | 1 |
| PmsScheduleSimplyFactory.RegistryPmsSchedule |  | 0% |  | 0% | 7 | 7 | 16 | 16 | 5 | 5 | 1 | 1 |
| EquipmentTrace |  | 0% | | n/a | 17 | 17 | 26 | 26 | 17 | 17 | 1 | 1 |
| POD.PodStatus |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 | 1 | 1 |
| Door.DoorStatus |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 | 1 | 1 |
| EquipmentConstrainPairDetailH |  | 0% | | n/a | 17 | 17 | 25 | 25 | 17 | 17 | 1 | 1 |
| EquipmentReport |  | 0% | | n/a | 15 | 15 | 23 | 23 | 15 | 15 | 1 | 1 |
| EquipmentVariable |  | 0% | | n/a | 15 | 15 | 23 | 23 | 15 | 15 | 1 | 1 |
| EquipmentEvent |  | 0% | | n/a | 13 | 13 | 20 | 20 | 13 | 13 | 1 | 1 |
| PrincipalSupportingEvent |  | 0% | | n/a | 13 | 13 | 19 | 19 | 13 | 13 | 1 | 1 |
| Carrier |  | 0% | | n/a | 12 | 12 | 19 | 19 | 12 | 12 | 1 | 1 |
| SvidDefinition |  | 0% | | n/a | 13 | 13 | 19 | 19 | 13 | 13 | 1 | 1 |
| TransComment |  | 0% | | n/a | 11 | 11 | 16 | 16 | 11 | 11 | 1 | 1 |
| EntityGroup |  | 0% |  | 0% | 9 | 9 | 15 | 15 | 8 | 8 | 1 | 1 |
| EmployeeCertificationItem |  | 0% | | n/a | 11 | 11 | 16 | 16 | 11 | 11 | 1 | 1 |
| EquipmentConstant |  | 0% | | n/a | 9 | 9 | 14 | 14 | 9 | 9 | 1 | 1 |
| POD |  | 0% | | n/a | 9 | 9 | 15 | 15 | 9 | 9 | 1 | 1 |
| Door |  | 0% | | n/a | 9 | 9 | 15 | 15 | 9 | 9 | 1 | 1 |
| EntityDocument |  | 0% | | n/a | 9 | 9 | 13 | 13 | 9 | 9 | 1 | 1 |
| EntityStatus |  | 0% | | n/a | 9 | 9 | 13 | 13 | 9 | 9 | 1 | 1 |
| EquipmentModel |  | 0% | | n/a | 8 | 8 | 13 | 13 | 8 | 8 | 1 | 1 |
| ReticleGroup |  | 0% | | n/a | 4 | 4 | 8 | 8 | 4 | 4 | 1 | 1 |
| AllowableEventSet |  | 0% |  | 0% | 5 | 5 | 9 | 9 | 4 | 4 | 1 | 1 |
| SeasonRecipeGroup |  | 0% | | n/a | 7 | 7 | 10 | 10 | 7 | 7 | 1 | 1 |
| SeasonHistory |  | 0% | | n/a | 5 | 5 | 7 | 7 | 5 | 5 | 1 | 1 |
| ReticleFamily |  | 0% | | n/a | 4 | 4 | 7 | 7 | 4 | 4 | 1 | 1 |
| Carrier.CarrierType |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 | 1 | 1 |
| POD.PodType |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 | 1 | 1 |
| Door.DoorType |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 | 1 | 1 |
| PmsScheduleSimplyFactory |  | 0% | | n/a | 2 | 2 | 2 | 2 | 2 | 2 | 1 | 1 |