| setEqptId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setEqptRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setSequence(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setFlowRecipeId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setFlowRecipeRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setLowerWaferCount(Integer) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setUpperWaferCount(Integer) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setArgRecipeId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setArgRecipeRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setWaferCountRange(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| ArgRecipeInfo() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getEqptId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getEqptRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getSequence() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getFlowRecipeId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getFlowRecipeRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getLowerWaferCount() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getUpperWaferCount() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getArgRecipeId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getArgRecipeRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getWaferCountRange() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |