| setLotId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setCarrierId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setLotSpecialStepRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setLotRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setStepSequence(Integer) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setIsSlot(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setWflStepRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setProductRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setProcessRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setProcessVersion(Integer) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setProcessStepVersion(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setProcessStepIdVersion(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setRouteSeq(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setRouteRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setRouteVersion(Integer) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setOperationSeq(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setOperationRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setOperationVersion(Integer) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setStageId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setLayerId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setCarrierRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setEquipmentRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setEquipmentId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setPollutionLevel(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setRecipeStr(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setCreateUser(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setCreateTime(Date) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setUpdateUser(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setUpdateTime(Date) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setProductId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setProcessId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setSlot(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setParameterId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setFormula(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setLowerLimit(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setUpperLimit(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setEntityGroupId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setEntityGroupRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setAttributeData1(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setAttributeData2(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setAttributeData3(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setAttributeData4(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setAttributeData5(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setLotStepSeq(Integer) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setLotOperationSeq(Integer) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setMeasurationFlag(Integer) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setSampleDataNumber(Integer) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setParameterSetId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setStepId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setStepDesc(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setProcessLocation(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setStepSeq(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setWaferNum(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setRealEquipmentId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setRealEquipmentRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| EqpMonitorLotSpecialStep() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getLotId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getCarrierId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getLotSpecialStepRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getLotRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getStepSequence() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getIsSlot() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getWflStepRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getProductRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getProcessRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getProcessVersion() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getProcessStepVersion() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getProcessStepIdVersion() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getRouteSeq() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getRouteRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getRouteVersion() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getOperationSeq() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getOperationRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getOperationVersion() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getStageId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getLayerId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getCarrierRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getEquipmentRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getEquipmentId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getPollutionLevel() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getRecipeStr() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getCreateUser() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getCreateTime() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getUpdateUser() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getUpdateTime() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getProductId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getProcessId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getSlot() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getParameterId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getFormula() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getLowerLimit() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getUpperLimit() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getEntityGroupId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getEntityGroupRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getAttributeData1() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getAttributeData2() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getAttributeData3() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getAttributeData4() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getAttributeData5() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getLotStepSeq() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getLotOperationSeq() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getMeasurationFlag() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getSampleDataNumber() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getParameterSetId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getStepId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getStepDesc() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getProcessLocation() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getStepSeq() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getWaferNum() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getRealEquipmentId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getRealEquipmentRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |