EqpMonitorLotSpecialStep.java

package com.mycim.valueobject.prp;

import com.mycim.valueobject.bas.NamedObject;

import java.util.Date;

public class EqpMonitorLotSpecialStep extends NamedObject {

    private Long lotSpecialStepRrn;

    private Long lotRrn;

    private String lotId;

    private Integer stepSequence;

    private String isSlot;

    private Long wflStepRrn;

    private Long productRrn;

    private String productId;

    private Long processRrn;

    private String processId;

    private Integer processVersion;

    private String processStepVersion;

    private String processStepIdVersion;

    private String routeSeq;

    private Long routeRrn;

    private Integer routeVersion;

    private String operationSeq;

    private Long operationRrn;

    private Integer operationVersion;

    private String stageId;

    private String layerId;

    private Long carrierRrn;

    private String carrierId;

    private Long equipmentRrn;

    private String equipmentId;

    private String pollutionLevel;

    private String recipeStr;

    private String slot;

    private String parameterId;

    private String formula;

    private Long lowerLimit;

    private Long upperLimit;

    private String createUser;

    private Date createTime;

    private String updateUser;

    private Date updateTime;

    private String entityGroupId;

    private Long entityGroupRrn;

    private String attributeData1;

    private String attributeData2;

    private String attributeData3;

    private String attributeData4;

    private String attributeData5;

    private Integer lotStepSeq;

    private Integer lotOperationSeq;

    private Integer measurationFlag;

    private Integer sampleDataNumber;

    private String parameterSetId;

    /**
     * 步骤号: 用户手填,仅是显示
     **/
    private String stepId;

    private String stepDesc;

    private String processLocation;

    /**
     * 步骤序号
     **/
    private String stepSeq;

    private String waferNum;

    private String realEquipmentId;

    private Long realEquipmentRrn;

    public String getLotId() {
        return lotId;
    }

    public void setLotId(String lotId) {
        this.lotId = lotId;
    }

    public String getCarrierId() {
        return carrierId;
    }

    public void setCarrierId(String carrierId) {
        this.carrierId = carrierId;
    }

    public Long getLotSpecialStepRrn() {
        return lotSpecialStepRrn;
    }

    public void setLotSpecialStepRrn(Long lotSpecialStepRrn) {
        this.lotSpecialStepRrn = lotSpecialStepRrn;
    }

    public Long getLotRrn() {
        return lotRrn;
    }

    public void setLotRrn(Long lotRrn) {
        this.lotRrn = lotRrn;
    }

    public Integer getStepSequence() {
        return stepSequence;
    }

    public void setStepSequence(Integer stepSequence) {
        this.stepSequence = stepSequence;
    }

    public String getIsSlot() {
        return isSlot;
    }

    public void setIsSlot(String isSlot) {
        this.isSlot = isSlot;
    }

    public Long getWflStepRrn() {
        return wflStepRrn;
    }

    public void setWflStepRrn(Long wflStepRrn) {
        this.wflStepRrn = wflStepRrn;
    }

    public Long getProductRrn() {
        return productRrn;
    }

    public void setProductRrn(Long productRrn) {
        this.productRrn = productRrn;
    }

    public Long getProcessRrn() {
        return processRrn;
    }

    public void setProcessRrn(Long processRrn) {
        this.processRrn = processRrn;
    }

    public Integer getProcessVersion() {
        return processVersion;
    }

    public void setProcessVersion(Integer processVersion) {
        this.processVersion = processVersion;
    }

    public String getProcessStepVersion() {
        return processStepVersion;
    }

    public void setProcessStepVersion(String processStepVersion) {
        this.processStepVersion = processStepVersion;
    }

    public String getProcessStepIdVersion() {
        return processStepIdVersion;
    }

    public void setProcessStepIdVersion(String processStepIdVersion) {
        this.processStepIdVersion = processStepIdVersion;
    }

    public String getRouteSeq() {
        return routeSeq;
    }

    public void setRouteSeq(String routeSeq) {
        this.routeSeq = routeSeq;
    }

    public Long getRouteRrn() {
        return routeRrn;
    }

    public void setRouteRrn(Long routeRrn) {
        this.routeRrn = routeRrn;
    }

    public Integer getRouteVersion() {
        return routeVersion;
    }

    public void setRouteVersion(Integer routeVersion) {
        this.routeVersion = routeVersion;
    }

    public String getOperationSeq() {
        return operationSeq;
    }

    public void setOperationSeq(String operationSeq) {
        this.operationSeq = operationSeq;
    }

    public Long getOperationRrn() {
        return operationRrn;
    }

    public void setOperationRrn(Long operationRrn) {
        this.operationRrn = operationRrn;
    }

    public Integer getOperationVersion() {
        return operationVersion;
    }

    public void setOperationVersion(Integer operationVersion) {
        this.operationVersion = operationVersion;
    }

    public String getStageId() {
        return stageId;
    }

    public void setStageId(String stageId) {
        this.stageId = stageId;
    }

    public String getLayerId() {
        return layerId;
    }

    public void setLayerId(String layerId) {
        this.layerId = layerId;
    }

    public Long getCarrierRrn() {
        return carrierRrn;
    }

    public void setCarrierRrn(Long carrierRrn) {
        this.carrierRrn = carrierRrn;
    }

    public Long getEquipmentRrn() {
        return equipmentRrn;
    }

    public void setEquipmentRrn(Long equipmentRrn) {
        this.equipmentRrn = equipmentRrn;
    }

    public String getEquipmentId() {
        return equipmentId;
    }

    public void setEquipmentId(String equipmentId) {
        this.equipmentId = equipmentId;
    }

    public String getPollutionLevel() {
        return pollutionLevel;
    }

    public void setPollutionLevel(String pollutionLevel) {
        this.pollutionLevel = pollutionLevel;
    }

    public String getRecipeStr() {
        return recipeStr;
    }

    public void setRecipeStr(String recipeStr) {
        this.recipeStr = recipeStr;
    }

    public String getCreateUser() {
        return createUser;
    }

    public void setCreateUser(String createUser) {
        this.createUser = createUser;
    }

    public Date getCreateTime() {
        return createTime;
    }

    public void setCreateTime(Date createTime) {
        this.createTime = createTime;
    }

    public String getUpdateUser() {
        return updateUser;
    }

    public void setUpdateUser(String updateUser) {
        this.updateUser = updateUser;
    }

    public Date getUpdateTime() {
        return updateTime;
    }

    public void setUpdateTime(Date updateTime) {
        this.updateTime = updateTime;
    }

    public String getProductId() {
        return productId;
    }

    public void setProductId(String productId) {
        this.productId = productId;
    }

    public String getProcessId() {
        return processId;
    }

    public void setProcessId(String processId) {
        this.processId = processId;
    }

    public String getSlot() {
        return slot;
    }

    public void setSlot(String slot) {
        this.slot = slot;
    }

    public String getParameterId() {
        return parameterId;
    }

    public void setParameterId(String parameterId) {
        this.parameterId = parameterId;
    }

    public String getFormula() {
        return formula;
    }

    public void setFormula(String formula) {
        this.formula = formula;
    }

    public Long getLowerLimit() {
        return lowerLimit;
    }

    public void setLowerLimit(Long lowerLimit) {
        this.lowerLimit = lowerLimit;
    }

    public Long getUpperLimit() {
        return upperLimit;
    }

    public void setUpperLimit(Long upperLimit) {
        this.upperLimit = upperLimit;
    }

    public String getEntityGroupId() {
        return entityGroupId;
    }

    public void setEntityGroupId(String entityGroupId) {
        this.entityGroupId = entityGroupId;
    }

    public Long getEntityGroupRrn() {
        return entityGroupRrn;
    }

    public void setEntityGroupRrn(Long entityGroupRrn) {
        this.entityGroupRrn = entityGroupRrn;
    }

    public String getAttributeData1() {
        return attributeData1;
    }

    public void setAttributeData1(String attributeData1) {
        this.attributeData1 = attributeData1;
    }

    public String getAttributeData2() {
        return attributeData2;
    }

    public void setAttributeData2(String attributeData2) {
        this.attributeData2 = attributeData2;
    }

    public String getAttributeData3() {
        return attributeData3;
    }

    public void setAttributeData3(String attributeData3) {
        this.attributeData3 = attributeData3;
    }

    public String getAttributeData4() {
        return attributeData4;
    }

    public void setAttributeData4(String attributeData4) {
        this.attributeData4 = attributeData4;
    }

    public String getAttributeData5() {
        return attributeData5;
    }

    public void setAttributeData5(String attributeData5) {
        this.attributeData5 = attributeData5;
    }

    public Integer getLotStepSeq() {
        return lotStepSeq;
    }

    public void setLotStepSeq(Integer lotStepSeq) {
        this.lotStepSeq = lotStepSeq;
    }

    public Integer getLotOperationSeq() {
        return lotOperationSeq;
    }

    public void setLotOperationSeq(Integer lotOperationSeq) {
        this.lotOperationSeq = lotOperationSeq;
    }

    public Integer getMeasurationFlag() {
        return measurationFlag;
    }

    public void setMeasurationFlag(Integer measurationFlag) {
        this.measurationFlag = measurationFlag;
    }

    public Integer getSampleDataNumber() {
        return sampleDataNumber;
    }

    public void setSampleDataNumber(Integer sampleDataNumber) {
        this.sampleDataNumber = sampleDataNumber;
    }

    public String getParameterSetId() {
        return parameterSetId;
    }

    public void setParameterSetId(String parameterSetId) {
        this.parameterSetId = parameterSetId;
    }

    public String getStepId() {
        return stepId;
    }

    public void setStepId(String stepId) {
        this.stepId = stepId;
    }

    public String getStepDesc() {
        return stepDesc;
    }

    public void setStepDesc(String stepDesc) {
        this.stepDesc = stepDesc;
    }

    public String getProcessLocation() {
        return processLocation;
    }

    public void setProcessLocation(String processLocation) {
        this.processLocation = processLocation;
    }

    public String getStepSeq() {
        return stepSeq;
    }

    public void setStepSeq(String stepSeq) {
        this.stepSeq = stepSeq;
    }

    public String getWaferNum() {
        return waferNum;
    }

    public void setWaferNum(String waferNum) {
        this.waferNum = waferNum;
    }

    public String getRealEquipmentId() {
        return realEquipmentId;
    }

    public void setRealEquipmentId(String realEquipmentId) {
        this.realEquipmentId = realEquipmentId;
    }

    public Long getRealEquipmentRrn() {
        return realEquipmentRrn;
    }

    public void setRealEquipmentRrn(Long realEquipmentRrn) {
        this.realEquipmentRrn = realEquipmentRrn;
    }

}