| setWaferNum(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setStepSeq(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setEntityGroupId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setParameterSetId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setOperationId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setOperationDesc(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setContaimnation(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setProcessLocation(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setStageId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setStepRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setModelRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setModelSeq(Integer) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setWorkflowStepRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setEqptId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setSlot(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setRecipeId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setParameterId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setCalculateFormula(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setLowerLimit(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setUpperLimit(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setMeasurationFlag(Integer) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setSampleDataNumber(Integer) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| EqpMonitorStep() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getWaferNum() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getStepSeq() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getEntityGroupId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getParameterSetId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getOperationId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getOperationDesc() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getContaimnation() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getProcessLocation() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getStageId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getStepRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getModelRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getModelSeq() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getWorkflowStepRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getEqptId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getSlot() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getRecipeId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getParameterId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getCalculateFormula() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getLowerLimit() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getUpperLimit() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getMeasurationFlag() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getSampleDataNumber() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |