EqpMonitorStep.java
package com.mycim.valueobject.prp;
import com.mycim.valueobject.bas.NamedObject;
public class EqpMonitorStep extends NamedObject {
/**
*
*/
private static final long serialVersionUID = -4743623407707585035L;
private Long stepRrn;
private Long modelRrn;
private Integer modelSeq;
private Long workflowStepRrn;
private String eqptId;
private String slot;
private String recipeId;
private String parameterId;
private String calculateFormula;
private Long lowerLimit;
private Long upperLimit;
private Integer measurationFlag;
private Integer sampleDataNumber;
private String entityGroupId;
private String parameterSetId;
private String operationId;
private String operationDesc;
private String contaimnation;
private String processLocation;
private String stageId;
private String stepSeq;
private String waferNum;
public String getWaferNum() {
return waferNum;
}
public void setWaferNum(String waferNum) {
this.waferNum = waferNum;
}
public String getStepSeq() {
return stepSeq;
}
public void setStepSeq(String stepSeq) {
this.stepSeq = stepSeq;
}
public String getEntityGroupId() {
return entityGroupId;
}
public void setEntityGroupId(String entityGroupId) {
this.entityGroupId = entityGroupId;
}
public String getParameterSetId() {
return parameterSetId;
}
public void setParameterSetId(String parameterSetId) {
this.parameterSetId = parameterSetId;
}
public String getOperationId() {
return operationId;
}
public void setOperationId(String operationId) {
this.operationId = operationId;
}
public String getOperationDesc() {
return operationDesc;
}
public void setOperationDesc(String operationDesc) {
this.operationDesc = operationDesc;
}
public String getContaimnation() {
return contaimnation;
}
public void setContaimnation(String contaimnation) {
this.contaimnation = contaimnation;
}
public String getProcessLocation() {
return processLocation;
}
public void setProcessLocation(String processLocation) {
this.processLocation = processLocation;
}
public String getStageId() {
return stageId;
}
public void setStageId(String stageId) {
this.stageId = stageId;
}
public Long getStepRrn() {
return stepRrn;
}
public void setStepRrn(Long stepRrn) {
this.stepRrn = stepRrn;
}
public Long getModelRrn() {
return modelRrn;
}
public void setModelRrn(Long modelRrn) {
this.modelRrn = modelRrn;
}
public Integer getModelSeq() {
return modelSeq;
}
public void setModelSeq(Integer modelSeq) {
this.modelSeq = modelSeq;
}
public Long getWorkflowStepRrn() {
return workflowStepRrn;
}
public void setWorkflowStepRrn(Long workflowStepRrn) {
this.workflowStepRrn = workflowStepRrn;
}
public String getEqptId() {
return eqptId;
}
public void setEqptId(String eqptId) {
this.eqptId = eqptId;
}
public String getSlot() {
return slot;
}
public void setSlot(String slot) {
this.slot = slot;
}
public String getRecipeId() {
return recipeId;
}
public void setRecipeId(String recipeId) {
this.recipeId = recipeId;
}
public String getParameterId() {
return parameterId;
}
public void setParameterId(String parameterId) {
this.parameterId = parameterId;
}
public String getCalculateFormula() {
return calculateFormula;
}
public void setCalculateFormula(String calculateFormula) {
this.calculateFormula = calculateFormula;
}
public Long getLowerLimit() {
return lowerLimit;
}
public void setLowerLimit(Long lowerLimit) {
this.lowerLimit = lowerLimit;
}
public Long getUpperLimit() {
return upperLimit;
}
public void setUpperLimit(Long upperLimit) {
this.upperLimit = upperLimit;
}
public Integer getMeasurationFlag() {
return measurationFlag;
}
public void setMeasurationFlag(Integer measurationFlag) {
this.measurationFlag = measurationFlag;
}
public Integer getSampleDataNumber() {
return sampleDataNumber;
}
public void setSampleDataNumber(Integer sampleDataNumber) {
this.sampleDataNumber = sampleDataNumber;
}
}