| setUnitSpecialStepRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setLotSpecialStepRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setUnitRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setUnitId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setSlotSeq(Integer) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setLotRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setLotId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setWflStepRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setCarrierRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setCarrierId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setPositionInCarrier(Integer) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setRecipeStr(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setParameterId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setFormula(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setLowerLimit(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setUpperLimit(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setAttributeData1(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setAttributeData2(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setAttributeData3(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setAttributeData4(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setAttributeData5(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setSlotPosition(Integer) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| EqpMonitorUnitSpecialStep() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getUnitSpecialStepRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getLotSpecialStepRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getUnitRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getUnitId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getSlotSeq() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getLotRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getLotId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getWflStepRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getCarrierRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getCarrierId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getPositionInCarrier() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getRecipeStr() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getParameterId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getFormula() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getLowerLimit() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getUpperLimit() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getAttributeData1() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getAttributeData2() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getAttributeData3() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getAttributeData4() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getAttributeData5() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getSlotPosition() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |