| setElogSheetRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setEquipmentId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setEquipmentRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setEquipmentGroupId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setChamberType(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setLotId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setLotRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setStepSequence(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setLotType(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setQty(Integer) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setChamberQty(Integer) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setBatchId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setRecipeId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setRecipePhysicalId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setHotFlag(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setPriority(Integer) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setCarrierId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setProductId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setProductVersion(Integer) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setProcessId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setProcessVersion(Integer) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setRouteId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setOperationId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setFlowSeq(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setReticleGroupId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setReticleId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setProcessLocation(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setStageId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setPollutionLevel(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setCustomerId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setWorkArea(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setProcessStartUserId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setProcessStartTime(Date) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setProcessEndUserId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setProcessEndTime(Date) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setActionType(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| ElogSheet() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getElogSheetRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getEquipmentId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getEquipmentRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getEquipmentGroupId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getChamberType() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getLotId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getLotRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getStepSequence() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getLotType() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getQty() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getChamberQty() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getBatchId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getRecipeId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getRecipePhysicalId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getHotFlag() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getPriority() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getCarrierId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getProductId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getProductVersion() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getProcessId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getProcessVersion() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getRouteId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getOperationId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getFlowSeq() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getReticleGroupId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getReticleId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getProcessLocation() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getStageId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getPollutionLevel() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getCustomerId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getWorkArea() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getProcessStartUserId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getProcessStartTime() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getProcessEndUserId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getProcessEndTime() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getActionType() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |