ElogSheet.java

package com.mycim.valueobject.wip;

import java.io.Serializable;
import java.util.Date;

/**
 * @author finatice.yang
 * @date 2021/7/20
 **/
public class ElogSheet implements Serializable {

    private Long elogSheetRrn;

    private String equipmentId;

    private Long equipmentRrn;

    private String equipmentGroupId;

    private String chamberType;

    private String lotId;

    private Long lotRrn;

    private Long stepSequence;

    private String lotType;

    private Integer qty;

    private Integer chamberQty;

    private String batchId;

    private String recipeId;

    private String recipePhysicalId;

    private String hotFlag;

    private Integer priority;

    private String carrierId;

    private String productId;

    private Integer productVersion;

    private String processId;

    private Integer processVersion;

    private String routeId;

    private String operationId;

    private String flowSeq;

    private String reticleGroupId;

    private String reticleId;

    private String processLocation;

    private String stageId;

    private String pollutionLevel;

    private String customerId;

    private String workArea;

    private String processStartUserId;

    private Date processStartTime;

    private String processEndUserId;

    private Date processEndTime;

    private String actionType;

    public Long getElogSheetRrn() {
        return elogSheetRrn;
    }

    public void setElogSheetRrn(Long elogSheetRrn) {
        this.elogSheetRrn = elogSheetRrn;
    }

    public String getEquipmentId() {
        return equipmentId;
    }

    public void setEquipmentId(String equipmentId) {
        this.equipmentId = equipmentId;
    }

    public Long getEquipmentRrn() {
        return equipmentRrn;
    }

    public void setEquipmentRrn(Long equipmentRrn) {
        this.equipmentRrn = equipmentRrn;
    }

    public String getEquipmentGroupId() {
        return equipmentGroupId;
    }

    public void setEquipmentGroupId(String equipmentGroupId) {
        this.equipmentGroupId = equipmentGroupId;
    }

    public String getChamberType() {
        return chamberType;
    }

    public void setChamberType(String chamberType) {
        this.chamberType = chamberType;
    }

    public String getLotId() {
        return lotId;
    }

    public void setLotId(String lotId) {
        this.lotId = lotId;
    }

    public Long getLotRrn() {
        return lotRrn;
    }

    public void setLotRrn(Long lotRrn) {
        this.lotRrn = lotRrn;
    }

    public Long getStepSequence() {
        return stepSequence;
    }

    public void setStepSequence(Long stepSequence) {
        this.stepSequence = stepSequence;
    }

    public String getLotType() {
        return lotType;
    }

    public void setLotType(String lotType) {
        this.lotType = lotType;
    }

    public Integer getQty() {
        return qty;
    }

    public void setQty(Integer qty) {
        this.qty = qty;
    }

    public Integer getChamberQty() {
        return chamberQty;
    }

    public void setChamberQty(Integer chamberQty) {
        this.chamberQty = chamberQty;
    }

    public String getBatchId() {
        return batchId;
    }

    public void setBatchId(String batchId) {
        this.batchId = batchId;
    }

    public String getRecipeId() {
        return recipeId;
    }

    public void setRecipeId(String recipeId) {
        this.recipeId = recipeId;
    }

    public String getRecipePhysicalId() {
        return recipePhysicalId;
    }

    public void setRecipePhysicalId(String recipePhysicalId) {
        this.recipePhysicalId = recipePhysicalId;
    }

    public String getHotFlag() {
        return hotFlag;
    }

    public void setHotFlag(String hotFlag) {
        this.hotFlag = hotFlag;
    }

    public Integer getPriority() {
        return priority;
    }

    public void setPriority(Integer priority) {
        this.priority = priority;
    }

    public String getCarrierId() {
        return carrierId;
    }

    public void setCarrierId(String carrierId) {
        this.carrierId = carrierId;
    }

    public String getProductId() {
        return productId;
    }

    public void setProductId(String productId) {
        this.productId = productId;
    }

    public Integer getProductVersion() {
        return productVersion;
    }

    public void setProductVersion(Integer productVersion) {
        this.productVersion = productVersion;
    }

    public String getProcessId() {
        return processId;
    }

    public void setProcessId(String processId) {
        this.processId = processId;
    }

    public Integer getProcessVersion() {
        return processVersion;
    }

    public void setProcessVersion(Integer processVersion) {
        this.processVersion = processVersion;
    }

    public String getRouteId() {
        return routeId;
    }

    public void setRouteId(String routeId) {
        this.routeId = routeId;
    }

    public String getOperationId() {
        return operationId;
    }

    public void setOperationId(String operationId) {
        this.operationId = operationId;
    }

    public String getFlowSeq() {
        return flowSeq;
    }

    public void setFlowSeq(String flowSeq) {
        this.flowSeq = flowSeq;
    }

    public String getReticleGroupId() {
        return reticleGroupId;
    }

    public void setReticleGroupId(String reticleGroupId) {
        this.reticleGroupId = reticleGroupId;
    }

    public String getReticleId() {
        return reticleId;
    }

    public void setReticleId(String reticleId) {
        this.reticleId = reticleId;
    }

    public String getProcessLocation() {
        return processLocation;
    }

    public void setProcessLocation(String processLocation) {
        this.processLocation = processLocation;
    }

    public String getStageId() {
        return stageId;
    }

    public void setStageId(String stageId) {
        this.stageId = stageId;
    }

    public String getPollutionLevel() {
        return pollutionLevel;
    }

    public void setPollutionLevel(String pollutionLevel) {
        this.pollutionLevel = pollutionLevel;
    }

    public String getCustomerId() {
        return customerId;
    }

    public void setCustomerId(String customerId) {
        this.customerId = customerId;
    }

    public String getWorkArea() {
        return workArea;
    }

    public void setWorkArea(String workArea) {
        this.workArea = workArea;
    }

    public String getProcessStartUserId() {
        return processStartUserId;
    }

    public void setProcessStartUserId(String processStartUserId) {
        this.processStartUserId = processStartUserId;
    }

    public Date getProcessStartTime() {
        return processStartTime;
    }

    public void setProcessStartTime(Date processStartTime) {
        this.processStartTime = processStartTime;
    }

    public String getProcessEndUserId() {
        return processEndUserId;
    }

    public void setProcessEndUserId(String processEndUserId) {
        this.processEndUserId = processEndUserId;
    }

    public Date getProcessEndTime() {
        return processEndTime;
    }

    public void setProcessEndTime(Date processEndTime) {
        this.processEndTime = processEndTime;
    }

    public String getActionType() {
        return actionType;
    }

    public void setActionType(String actionType) {
        this.actionType = actionType;
    }

}