| setElogSubSheetRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setElogSheetRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setEquipmentId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setEquipmentRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setChamberType(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setChamberFlow(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setLotId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setLotRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setStepSequence(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setSlot(Integer) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setBatchId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setRecipeId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setRecipePhysicalId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setUnitId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setUnitQty(Integer) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setCarrierId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setProcessStartUserId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setProcessStartTime(Date) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setProcessEndUserId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setProcessEndTime(Date) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| ElogSubSheet() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getElogSubSheetRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getElogSheetRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getEquipmentId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getEquipmentRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getChamberType() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getChamberFlow() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getLotId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getLotRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getStepSequence() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getSlot() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getBatchId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getRecipeId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getRecipePhysicalId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getUnitId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getUnitQty() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getCarrierId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getProcessStartUserId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getProcessStartTime() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getProcessEndUserId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getProcessEndTime() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |