ElogSubSheet.java

package com.mycim.valueobject.wip;

import java.io.Serializable;
import java.util.Date;

/**
 * @author finatice.yang
 * @date 2021/7/20
 **/
public class ElogSubSheet implements Serializable {

    private Long elogSubSheetRrn;

    private Long elogSheetRrn;

    private String equipmentId;

    private Long equipmentRrn;

    private String chamberType;

    private String chamberFlow;

    private String lotId;

    private Long lotRrn;

    private Long stepSequence;

    private Integer slot;

    private String batchId;

    private String recipeId;

    private String recipePhysicalId;

    private String unitId;

    private Integer unitQty;

    private String carrierId;

    private String processStartUserId;

    private Date processStartTime;

    private String processEndUserId;

    private Date processEndTime;

    public Long getElogSubSheetRrn() {
        return elogSubSheetRrn;
    }

    public void setElogSubSheetRrn(Long elogSubSheetRrn) {
        this.elogSubSheetRrn = elogSubSheetRrn;
    }

    public Long getElogSheetRrn() {
        return elogSheetRrn;
    }

    public void setElogSheetRrn(Long elogSheetRrn) {
        this.elogSheetRrn = elogSheetRrn;
    }

    public String getEquipmentId() {
        return equipmentId;
    }

    public void setEquipmentId(String equipmentId) {
        this.equipmentId = equipmentId;
    }

    public Long getEquipmentRrn() {
        return equipmentRrn;
    }

    public void setEquipmentRrn(Long equipmentRrn) {
        this.equipmentRrn = equipmentRrn;
    }

    public String getChamberType() {
        return chamberType;
    }

    public void setChamberType(String chamberType) {
        this.chamberType = chamberType;
    }

    public String getChamberFlow() {
        return chamberFlow;
    }

    public void setChamberFlow(String chamberFlow) {
        this.chamberFlow = chamberFlow;
    }

    public String getLotId() {
        return lotId;
    }

    public void setLotId(String lotId) {
        this.lotId = lotId;
    }

    public Long getLotRrn() {
        return lotRrn;
    }

    public void setLotRrn(Long lotRrn) {
        this.lotRrn = lotRrn;
    }

    public Long getStepSequence() {
        return stepSequence;
    }

    public void setStepSequence(Long stepSequence) {
        this.stepSequence = stepSequence;
    }

    public Integer getSlot() {
        return slot;
    }

    public void setSlot(Integer slot) {
        this.slot = slot;
    }

    public String getBatchId() {
        return batchId;
    }

    public void setBatchId(String batchId) {
        this.batchId = batchId;
    }

    public String getRecipeId() {
        return recipeId;
    }

    public void setRecipeId(String recipeId) {
        this.recipeId = recipeId;
    }

    public String getRecipePhysicalId() {
        return recipePhysicalId;
    }

    public void setRecipePhysicalId(String recipePhysicalId) {
        this.recipePhysicalId = recipePhysicalId;
    }

    public String getUnitId() {
        return unitId;
    }

    public void setUnitId(String unitId) {
        this.unitId = unitId;
    }

    public Integer getUnitQty() {
        return unitQty;
    }

    public void setUnitQty(Integer unitQty) {
        this.unitQty = unitQty;
    }

    public String getCarrierId() {
        return carrierId;
    }

    public void setCarrierId(String carrierId) {
        this.carrierId = carrierId;
    }

    public String getProcessStartUserId() {
        return processStartUserId;
    }

    public void setProcessStartUserId(String processStartUserId) {
        this.processStartUserId = processStartUserId;
    }

    public Date getProcessStartTime() {
        return processStartTime;
    }

    public void setProcessStartTime(Date processStartTime) {
        this.processStartTime = processStartTime;
    }

    public String getProcessEndUserId() {
        return processEndUserId;
    }

    public void setProcessEndUserId(String processEndUserId) {
        this.processEndUserId = processEndUserId;
    }

    public Date getProcessEndTime() {
        return processEndTime;
    }

    public void setProcessEndTime(Date processEndTime) {
        this.processEndTime = processEndTime;
    }

}