| setEquipmentRunRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setEquipmentRunSequence(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setEquipmentRunTime(Timestamp) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setEquipmentRunUser(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setRunMode(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setRunType(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setFacilityRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setEquipmentId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setEquipmentGroupId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setChamberType(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setBatchId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setCarrierId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setCarrierMapRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setLotId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setLotType(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setStepSequence(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setQty1(Double) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setQty2(Double) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setJobRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setRunCardId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setHotFlag(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setPriority(Integer) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setProductId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setProcessId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setRouteId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setRouteSeq(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setOperationId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setOperationType(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setOperationSeq(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setProcessStepVersion(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setProcessStepIdVersion(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setWflStepPath(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setFlowSequence(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setStageId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setLogicRecipeId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setValidateRecipeId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setPhysicalRecipeId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setReticleGroupId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setReticleId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setCustomerId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setPollutionLevel(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setProcessLocation(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setProductVersion(Integer) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setProcessVersion(Integer) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setOperationVersion(Integer) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setRouteVersion(Integer) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setRunTypeDetail(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| EquipmentRunHistory() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getEquipmentRunRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getEquipmentRunSequence() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getEquipmentRunTime() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getEquipmentRunUser() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getRunMode() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getRunType() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getFacilityRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getEquipmentId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getEquipmentGroupId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getChamberType() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getBatchId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getCarrierId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getCarrierMapRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getLotId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getLotType() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getStepSequence() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getQty1() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getQty2() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getJobRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getRunCardId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getHotFlag() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getPriority() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getProductId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getProcessId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getRouteId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getRouteSeq() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getOperationId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getOperationType() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getOperationSeq() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getProcessStepVersion() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getProcessStepIdVersion() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getWflStepPath() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getFlowSequence() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getStageId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getLogicRecipeId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getValidateRecipeId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getPhysicalRecipeId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getReticleGroupId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getReticleId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getCustomerId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getPollutionLevel() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getProcessLocation() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getProductVersion() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getProcessVersion() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getOperationVersion() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getRouteVersion() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getRunTypeDetail() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |