| setRunCardRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setStepSerialNo(Integer) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setStepType(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setFlowSeq(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setStepPath(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setOperationRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setOperationId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setEquipmentId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setEquipmentGroupId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setReticleId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setReticleGroupId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setAreaId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setCheckWithRecipeFlag(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setEquipmentRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setEquipmentGroupRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setRecipeId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setRecipeRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setUnitRrns(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setMeasurementUnitRrns(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setPollutionLevel(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setOutParameterSetRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setInParameterSetRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setComments(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setReticleRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setReticleGroupRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setProcessLocation(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setStageId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setOperatorComments(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setStartOfMainQtime(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setEndOfMainQtime(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setStartOfRcQtime(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setEndOfRcQtime(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setRouteRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setTimeLimit(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setModule(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setFlipType(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| LotRunCardStep() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getRunCardRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getStepSerialNo() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getStepType() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getFlowSeq() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getStepPath() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getOperationRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getOperationId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getEquipmentId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getEquipmentGroupId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getReticleId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getReticleGroupId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getAreaId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getCheckWithRecipeFlag() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getEquipmentRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getEquipmentGroupRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getRecipeId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getRecipeRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getUnitRrns() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getMeasurementUnitRrns() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getPollutionLevel() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getOutParameterSetRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getInParameterSetRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getComments() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getReticleRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getReticleGroupRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getProcessLocation() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getStageId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getOperatorComments() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getStartOfMainQtime() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getEndOfMainQtime() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getStartOfRcQtime() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getEndOfRcQtime() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getRouteRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getTimeLimit() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getModule() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getFlipType() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |