| setFacilityRrn(long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setTransId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setCreatedUserRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setCreatedUserId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setLastUpdateUserRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setLastUpdateUserId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setLotId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setLotRrn(long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setProductRrn(long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setProcessRrn(long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setProcessVersion(int) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setRouteRrn(long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setRouteVersion(int) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setRouteSeq(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setSourceStepRrn(long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setSourcePrevStepRrn(long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setSourceNextStepRrn(long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setSourceWflRrn(long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setSourceWflId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setSourceWflSeq(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setSourceWflLinkId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setWflType(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setTargetWflPosition(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setTargetWflRrn(long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setTargetWflId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setTargetWflSeq(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setTargetStepRrn(long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setTargetWflStageId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setTargetWflLayerId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setTargetWflLinkId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setTargetRecipeId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setTargetRecipeRrn(long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setTargetReticleIds(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setTargetReticleRrns(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setTargetMvInParameterSetIds(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setTargetMvInParameterSetRrns(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setTargetMvOutParameterSetIds(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setTargetMvOutParameterSetRrns(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setTargetEquipmentRrns(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setTargetCheckEquipConstrain(boolean) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setTargetEquipmentIds(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setAttributeData1(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setAttributeData2(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setAttributeData3(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setAttributeData4(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setAttributeData5(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setComments(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setSourcePrevStepPath(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setTargetMvinInstruction(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setTargetMvotInstruction(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setTargetVerifyMvinInstruction(boolean) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setTargetVerifyMvotInstruction(boolean) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| LotSpecialInfo() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getFacilityRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getTransId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getCreatedUserRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getCreatedUserId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getLastUpdateUserRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getLastUpdateUserId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getLotId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getLotRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getProductRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getProcessRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getProcessVersion() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getRouteRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getRouteVersion() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getRouteSeq() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getSourceStepRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getSourcePrevStepRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getSourceNextStepRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getSourceWflRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getSourceWflId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getSourceWflSeq() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getSourceWflLinkId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getWflType() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getTargetWflPosition() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getTargetWflRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getTargetWflId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getTargetWflSeq() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getTargetStepRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getTargetWflStageId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getTargetWflLayerId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getTargetWflLinkId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getTargetRecipeId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getTargetRecipeRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getTargetReticleIds() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getTargetReticleRrns() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getTargetMvInParameterSetIds() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getTargetMvInParameterSetRrns() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getTargetMvOutParameterSetIds() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getTargetMvOutParameterSetRrns() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getTargetEquipmentRrns() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getTargetCheckEquipConstrain() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getTargetEquipmentIds() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getAttributeData1() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getAttributeData2() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getAttributeData3() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getAttributeData4() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getAttributeData5() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getComments() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getSourcePrevStepPath() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getTargetMvinInstruction() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getTargetMvotInstruction() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getTargetVerifyMvinInstruction() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getTargetVerifyMvotInstruction() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |