| setLotSpecialStepRrn(long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setRuncardId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setRuncardRrn(long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setLotRrn(long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setStepSequence(int) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setUnitId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setMeasSlotId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setContaminationFlag(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setProcessLocation(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setRemark(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setEqptId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setEqptRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setEqptGroupId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setEqptGroupRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setStepNo(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setCheckRcp(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setRecipeId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setWorkArea(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setParameterSetId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setParameterSetRrn(long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setLotStepSequence(long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setReticleRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setReticleGroupRrn(Long) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setReticleId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setReticleGroupId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setComments(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setStageId(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| setFlipType(String) |  | 0% | | n/a | 1 | 1 | 2 | 2 | 1 | 1 |
| SRCLotSpecialStep() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getLotSpecialStepRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getRuncardId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getRuncardRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getLotRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getStepSequence() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getUnitId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getMeasSlotId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getContaminationFlag() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getProcessLocation() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getRemark() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getEqptId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getEqptRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getEqptGroupId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getEqptGroupRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getStepNo() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getCheckRcp() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getRecipeId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getWorkArea() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getParameterSetId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getParameterSetRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getLotStepSequence() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getReticleRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getReticleGroupRrn() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getReticleId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getReticleGroupId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getComments() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getStageId() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |
| getFlipType() |  | 0% | | n/a | 1 | 1 | 1 | 1 | 1 | 1 |